| 摘要 |
Provided is a MEMS pressure sensing element, comprising: a substrate (1) provided with a recess; a pressure-sensitive film (100) arranged at the top of the substrate (1), the pressure-sensitive film (100) sealing the opening of the recess so as to form a sealed cavity (700); a pressure-sensitive bar (200) that is suspended inside the sealed cavity (700) and parallel to the pressure-sensitive film (100), and on which are arranged voltage-dependent resistors (300); the center of the pressure-sensitive bar (200) is fixedly connected to the center of the pressure-sensitive film (100), and the outer periphery is fixedly connected to the bottom wall of the recess so that the pressure-sensitive film (100) causes the pressure-sensitive bar (200) to bend and deform under the influence of the pressure of the external environment. Also provided is a method for manufacturing a MEMS pressure sensing element. When pressure is applied to the pressure-sensitive film (100), the pressure-sensitive film (100) moves the pressure-sensitive bar (200), causing the pressure-sensitive bar (200) to bend and in turn causing the resistance of the voltage-dependent resistors (300) on the pressure-sensitive bar (200) to change; thus not only is the pressure sensing function performed, but the electrical components of the pressure sensing element are also shielded from electromagnetic interference caused by the external environment. |
