IMPROVED ALIGNMENT METHOD FOR EFD ASSEMBLY

摘要

Disclosed is an improved alignment method for EFD assembly. The method comprises the following steps: (1) immersing a substrate (22) completely in a container filled with a liquid; (2) immersing a cover plate (21), to which a sealing piece (23) is adhered, completely in the container filled with a liquid and placing the cover plate on the substrate (22), such that the cover plate (21) and the substrate(22) are combined to form an EFD cell assembly, wherein there is no direct contact between the sealing piece (23) on the cover plate (21) and the substrate (22); (3) removing the EFD cell assembly from the container, wherein a liquid layer is kept between the sealing piece (23) on the cover plate (21) and the substrate (22); (4) aligning the cover plate (21) and the substrate (22); and (5) forming a permanent sealing between the sealing piece (23) on the cover plate (21) and the substrate (22). The invention greatly improves the reversibility and modifiability of alignment, and therefore increases the yield while ensuring the alignment precision.