DRIVE APPARATUS

摘要

A mirror device 200 disclosed herein includes a base 202, a mirror 205, an actuator 206, a fixed comb electrode 208, and a movable comb electrode 207. The movable comb electrode 207 includes: a beam portion 271; a hinge 273 configured to couple the beam portion 271 to the actuator 206 and having lower rigidity than the beam portion 271; a hinge 274 configured to couple the beam portion 271 to the base 202 and having lower rigidity than the beam portion 271; and electrode fingers 272, 272, . . . provided for the beam portion 271 and facing electrode fingers 281, 281, . . . of the fixed comb electrode 208. The movable comb electrode 207 is configured to tilt around a tilt axis B5 that passes through the hinge 274.

主权项

1. A drive apparatus comprising:
a base; a moving part; an actuator coupled to the moving part and configured to cause the moving part to tilt by tilting itself; a fixed comb electrode provided for the base and having electrode fingers; and a movable comb electrode arranged to face the fixed comb electrode, wherein the movable comb electrode includes: a beam portion; an input-side connector configured to couple the beam portion to either the moving part or the actuator, having lower rigidity than the beam portion, and being elastically deformable; a support-side connector configured to couple the beam portion to the base, having lower rigidity than the beam portion, and being elastically deformable; and electrode fingers provided for the beam portion and facing the electrode fingers of the fixed comb electrode, and the movable comb electrode is configured to tilt around a tilt axis that passes through the support-side connector.