发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
摘要 Provided is a semiconductor device that includes: a gate electrode (2); a channel layer (7) that is disposed in a region directly below or directly above the gate electrode (2); a source electrode (5) and drain electrode (6), which are disposed in contact with the channel layer (7); and a first insulating layer (3) that is disposed between the gate electrode (2) and the channel layer (7). The channel layer (7) includes a first oxide semiconductor, the source electrode (5) and/or drain electrode (6) includes a second oxide semiconductor, and the first oxide semiconductor and the second oxide semiconductor contain indium, tungsten, and zinc. A method for manufacturing the semiconductor device is also provided.
申请公布号 WO2017002384(A1) 申请公布日期 2017.01.05
申请号 WO2016JP53541 申请日期 2016.02.05
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 MIYANAGA, Miki;WATATANI, Kenichi;AWATA, Hideaki
分类号 H01L21/336;C23C14/08;C23C14/58;H01L21/363;H01L29/786 主分类号 H01L21/336
代理机构 代理人
主权项
地址