IMPEDANCE MATCHING DEVICE, LINEAR MOTION MODULE, AND RADIO FREQUENCY POWER SUPPLY DEVICE

摘要

An impedance matching device includes a first variable capacitor connected to an RF power source and including a first shaft moving linearly, a first linear motion unit axially coupled to the first shaft of the first variable capacitor to provide linear motion, a first insulating joint connecting the first shaft to a first driving shaft of the first linear motion unit, and a first displacement sensor adapted to measure a movement distance of the first driving shaft of the first linear motion unit.

主权项

1. A radio frequency (RF) power supply device comprising:
a single RF power source; and an impedance matching unit disposed between the RF power source and at least one load; wherein the impedance matching unit comprises: a first variable capacitor including a first shaft moving linearly; a first linear motion unit axially coupled to the first shaft of the first variable capacitor to provide linear motion; a first insulating joint connecting the first shaft to a first end of a first driving shaft of the first linear motion unit; and a first displacement sensor adapted to measure a movement distance of the first driving shaft of the first linear motion unit; and wherein the first linear motion unit comprises: a coil bobbin coupled to a second end of the first driving shaft; and a first permanent magnet unit disposed to encircle the first driving shaft and configured to provide linear motion to the coil bobbin.