首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
露光装置及びデバイス製造方法
摘要
【課題】液体の供給及び回収を所望状態で行うことができ、基板上に投影されるパターン像の劣化を抑えることができる露光装置を提供する。【解決手段】露光装置は、液体(LQ)を供給する供給口(12)及び液体(LQ)を回収する回収口(22)を有するノズル部材(70)と、メインコラム(1)の下側段部(7)に対してノズル部材(70)を防振支持する防振機構(60)とを備えている。【選択図】図1
申请公布号
JP2017004026(A)
申请公布日期
2017.01.05
申请号
JP20160192920
申请日期
2016.09.30
申请人
株式会社ニコン
发明人
原 英明
分类号
G03F7/20;G02B19/00;H01L21/027
主分类号
G03F7/20
代理机构
代理人
主权项
地址
您可能感兴趣的专利
A clutch mechanism for a roller blind
Gaming device having selectable revealed award values
METHOD FOR AN AIRCRAFT NAVIGATIONAL AID AND CORRESPONDING DEVICE
ANTI-AGEING SKIN COSMETIC
CHROMOSOME 9 GENES INVOLVED IN PREMATURE CANITIES
Bulkhead panel for use in a combustion chamber of a gas turbine engine
FREE-PISTON INTERNAL COMBUSTION ENGINE
Suction brush assembly and a vacuum cleaner having the same
Multimedia optical disc for storing audio data and sub-picture data in a plurality of channels as well as moving picture data and apparatus and method for reproducing the multimedia optical disc
NON-LINEAR TRANSMISSION LINE USING VARACTORS AND NON-PARALLEL WAVEGUIDE
Spark plug for internal combustion engine having better self-cleaning function
SYSTEM FOR PROVIDING DBS AND DSL VIDEO SERVICES TO MULTIPLE TELEVISION SETS
AUDIO-VISUAL SYSTEM AND METHOD FOR OPERATING THE AUDIO-VISUAL SYSTEM
Method and device for wavelet denoising
DIELECTRIC ELASTOMER ACTUATED SYSTEMS AND METHODS
SYNTHESIS OF PURINE DERIVATIVES
USE OF CETP INHIBITORS AND OPTIONALLY HMG COA REDUCTASE INHIBITORS AND/OR ANTIHYPERTENSIVE AGENTS
COMPOSITIONS COMPRISING PANTHETINE FOR THE TREATMENT OF DYSLIPIDEMIA
METHODS FOR THE TREATMENT OF SINUSITIS
SYSTEM AND METHOD FOR PRODUCING FOAMED AND STEAMED MILK FOR HOT BEVERAGES