ABERRATION CORRECTION METHOD, ABERRATION CORRECTION SYSTEM, AND CHARGED PARTICLE BEAM DEVICE

摘要

In order to provide an aberration correction system that achieves a charged particle beam in which anisotropy is reduced or eliminated on a sample surface, even in such instances where there is magnetic interference between poles of an aberration corrector, provided is a correction system that includes the following: a line cross position control device (209) that controls line cross positions of charged particle beams inside an aberration corrector such that a design value and a measured value match; an image shift amount extraction device (210); and a feedback determination device (211) that determines the necessity for changing an excitation amount of the aberration corrector from the image shift amount that has been extracted.