| 发明名称 |
MEMS SENSOR DEVICES HAVING A SELF-TEST MODE |
| 摘要 |
A micro-electro-mechanical system (MEMS) device comprises a micro-electro-mechanical system (MEMS) sensor; a detector circuit; a controller circuit coupled with the MEMS sensor; a first connection arranged between a first output of the MEMS sensor and a first input of the detector circuit; a second connection arranged between a second output of the MEMS sensor and a second input of the detector circuit; and a first switch arranged in the first connection. The controller circuit is configured to open the first switch during a first test mode so as to connect only a single input of the detector circuit with an output of the MEMS sensor. A further switch may be provided to connect two outputs of the MEMS sensor to a single input of the detector circuit. |
| 申请公布号 |
US2017003315(A1) |
申请公布日期 |
2017.01.05 |
| 申请号 |
US201514962328 |
申请日期 |
2015.12.08 |
| 申请人 |
FREESCALE SEMICONDUCTOR, INC. |
发明人 |
ENJALBERT JEROME ROMAIN;KNIFFIN MARGARET LESLIE;MCNEIL ANDREW C. |
| 分类号 |
G01P21/00;G01P15/125 |
主分类号 |
G01P21/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A micro-electro-mechanical system (MEMS) device comprising
a MEMS sensor; a detector circuit; a controller circuit coupled with the MEMS sensor; a first connection coupled to a first output of the MEMS sensor and a first input of the detector circuit; a second connection coupled to a second output of the MEMS sensor and a second input of the detector circuit; and a first switch arranged in the first connection, and configured to be controlled by the controller circuit, wherein the controller circuit is configured to open the first switch during a first test mode so as to connect only a single input of the detector circuit with an output of the MEMS sensor. |
| 地址 |
Austin TX US |
