ULTRASONIC PROBE AND ULTRASONIC TESTING DEVICE

摘要

The objective of the present invention is to make it easy to form an ultrasonic probe capable of transmitting ultrasonic waves having a frequency at least equal to 200 MHz, and an ultrasonic testing device. To this end, a laminated piezoelectric element 40 which is a constituent of an ultrasonic probe 4 is formed by providing a laminated piezoelectric film 48 between a lower electrode 42 and an upper electrode 49. The laminated piezoelectric film 48 comprises a ZnO film 43 having spontaneous polarization in a direction substantially perpendicular to the film surface, and a ScAlN film 44 which is different from ZnO and has spontaneous polarization in the opposite direction to ZnO, and which is formed directly on the ZnO film 43.