DETECTION APPARATUS FOR DETECTING PARTICLES

摘要

The invention relates to a detection apparatus (1) for detecting particles on or close to a particles detection surface (5) in a first optical detection mode and in a second optical detection mode, wherein a component of a light detection system (8) and/or a component of an optical system (9) of the detection apparatus is arranged to be used in the first detection mode and in the second detection mode. Since a component of the light detection system and/or a component of the optical system is arranged to be used in the first detection mode and in the second detection mode, this component does not need to be provided twice, i.e. for being used in the first detection mode and for being used in the second detection mode. This can lead to a reduced number of components and can make the detection apparatus technically less complex.

主权项

1. A detection apparatus for detecting particles on or close to a particle-detection-surface, the detection apparatus being adapted to be operable in a first optical detection mode and in a second optical detection mode, wherein the detection apparatus comprises:
a first light source for generating first light for illuminating the particle-detection-surface in the first optical detection mode, a second light source for generating second light for illuminating the particle-detection-surface in the second optical detection mode, a light detection system for detecting the first light and the second light after having met the-particles-detection-surface, an optical system for modifying the first light and the second light before meeting the particle-detection-surface and/or after having met the particle-detection-surface, wherein a component of the light detection system and/or a component of the optical system is arranged to be used in the first detection mode and in the second detection mode, and wherein the light detection system and the optical system are adapted such that the first light is modified by frustrated total internal reflection caused by the particles and that the modified first light is detected.