发明名称 |
METHOD FOR SURFACE-MODIFYING METAL SILICIDE, AND METHOD AND APPARATUS FOR PREPARING TRICHLOROSILANE USING SURFACE-MODIFIED METAL SILICIDE |
摘要 |
A method for preparing trichlorosilane according to an embodiment of the present invention comprises the steps of: supplying surface-modified metal silicide and metal grade silicon to a reaction unit; supplying silicon tetrachloride and hydrogen to the reaction unit; and supplying a product, which is generated by a reaction of metal grade silicon, silicon tetrachloride , and hydrogen in the presence of metal silicide in the reaction unit, to a separation unit, and separating a trichlorosilane component. In cases where a silicon tetrachloride hydrochlorination reaction is performed using the method for preparing trichlorosilane according to the embodiment of the present invention, the yield of trichlorosilane can be raised. |
申请公布号 |
EP3112317(A1) |
申请公布日期 |
2017.01.04 |
申请号 |
EP20150740890 |
申请日期 |
2015.01.19 |
申请人 |
Korea Research Institute of Chemical Technology;Hanwha Chemical Corporation |
发明人 |
CHOI, Won Choon;PARK, Yong Ki;LEE, Woo Hyung;SEO, Hwi Min;KANG, Na Young;HAN, Joo Hee;LEE, Dong Ho;AHN, Gui Ryong;KIM, Gil Ho |
分类号 |
C01B33/08;B01J19/24 |
主分类号 |
C01B33/08 |
代理机构 |
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代理人 |
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主权项 |
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