| 摘要 |
A probe system comprising a probe with first and second arms and a probe tip carried by the first and second arms. An illumination system is arranged to deform the probe by illuminating the first arm at a first actuation location and the second arm at a second actuation location each with a respective illumination power. An actuation controller is arranged to independently control the illumination power at each actuation location in order to control the height and tilt angle of the probe and thus height and lateral position of the tip. The first and second arms are mirror images of each other on opposite sides of a plane of symmetry passing through the probe tip. A detection system is provided which not only measures a height of the probe tip to generate a height signal, but also measures a tilt angle of the probe to generate a tilt signal from which the lateral position of the tip can be determined. |
