MULTILAYER REFLECTIVE MIRROR, METHOD FOR PRODUCING SAME, AND EXPOSURE DEVICE

摘要

A multilayer film reflective mirror for reflecting incident light is provided with: a substrate; a first multilayer film formed by alternately layering a Mo layer and a Si layer on a surface of the substrate; a detachable layer detachable from the first multilayer film; and a second multilayer film formed by alternately layering the Mo layer and the Si layer on the detachable layer, and the second multilayer film is removable by detaching the detachable layer by dissolving it with acid. When reflectance of the multilayer film reflective mirror is reduced, the reflectance can be increased by a simple operation.