MICROELECTROMECHANICAL MICROPHONE

摘要

A microelectromechanical microphone includes: a substrate (2); a sensor chip (5), integrating a microelectromechanical electroacoustic transducer (35); and a control chip (6) operatively coupled to the sensor chip (5). The sensor chip (5) and the control chip (6) are bonded to the substrate (2), and the sensor chip (5) in part overlies the control chip (6). The sensor chip (5) the has a first portion fixed to a face (6a) of the control chip (6) and comprises a transduction member (37) acoustically communicating with a sound port (11).