INTEGRATED LIGHT OPTICS AND GAS DELIVERY IN A CHARGED PARTICLE LENS
摘要
A method and apparatus for directing light or gas or both to a specimen positioned within about 2 mm from the lower end of a charged particle beam column. The charged particle beam column assembly includes a platform defining a specimen holding position and has a set of electrostatic lenses each including a set of electrodes. The assembly includes a final electrostatic lens that includes a final electrode that is closest to the specimen holding position. This final electrode defines at least one internal passageway having a terminus that is proximal to and directed toward the specimen holding position.
申请公布号
EP3113207(A1)
申请公布日期
2017.01.04
申请号
EP20150174195
申请日期
2015.06.29
申请人
FEI Company
发明人
Parker, N. William;Straw, Marcus;Filevich, Jorge;Botman, Aurélien;Utlaut, Mark;Randolph, Steven;Chandler, Clive