发明名称 |
SUBSTRATE TESTING APPARATUS AND SUBSTRATE TEMPERATURE ADJUSTMENT METHOD |
摘要 |
A substrate inspection apparatus includes a mounting table, an inspection unit, a temperature control unit and a medium channel. The mounting table mounts thereon a substrate on which a semiconductor device is formed. The inspection unit inspects electrical characteristics of the semiconductor device on the mounted substrate. The temperature control unit controls a temperature of the mounting table. The medium channel passes through the mounting table. The temperature control unit includes a high-temperature medium supply unit supplies a high-temperature medium to the medium channel, a low-temperature medium supply unit supplies a low-temperature medium to the medium channel and a medium mixing unit mixes the high-temperature medium and the low-temperature medium which are supplied to the medium channel. |
申请公布号 |
EP2980837(A4) |
申请公布日期 |
2017.01.04 |
申请号 |
EP20140773832 |
申请日期 |
2014.03.18 |
申请人 |
Tokyo Electron Limited |
发明人 |
AKAIKE, Yutaka;KOBAYASHI, Dai |
分类号 |
G01R31/28;H01L21/66;H01L21/683 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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