System and method for calibrating charge-regulating module

摘要

This invention provides a system and a method for calibrating charge-regulation module in vacuum environment. Means for mounting the charge-regulation module provides motions to the charge-regulation module such that a beam spot, illuminated by the charge-regulation module, on a sample surface can be moved to a pre-determined position which is irradiated by a charged particle beam.

主权项

1. A system for calibrating a charge-regulating module, comprising:
means for mounting a Laser and providing motions to move the Laser, wherein the Laser illuminates a beam on a surface of a sample with a beam spot thereon, and regulates charges on the sample surface; a detector for receiving a reflected beam from the beam spot on the sample surface; a controller, coupled to the detector, for receiving signals from the detector, calculating a position of the beam spot, and controlling the beam spot to a pre-determined location; and a transmission, coupled to the controller, and driving the mounting means such that the beam spot is moved to the pre-determined location.