Vibrating element, angular velocity sensor, electronic apparatus, and moving object

摘要

A vibrating element includes a vibration portion including a first main surface, a second main surface, a first side surface, and a second side surface, and extending in a first direction. The vibration portion includes a first groove formed in the first main surface and a second groove formed in the second main surface, and in a plan view seen from a direction perpendicular to the first main surface, the first groove and the second groove are provided to shift in opposite directions from each other, in a second direction.

主权项

1. A vibrating element comprising:
a base; and a vibration portion extending to a first direction from the base, wherein the vibration portion includes
a first main surface,a second main surface located on the opposite side of the first main surface,a first side surface,a second side surface located on the opposite side of the first side surface,a first groove formed on the first main surface, anda second groove formed on the second main surface, wherein in a plan view seen from a direction perpendicular to the first main surface, the first groove is provided to shift further from the first side surface than the second groove, wherein in a cross section perpendicular to the first direction in which the vibration portion extends, a length a1 between a first open end on the first side surface side of the first groove and a first end at which the first main surface and the first side surface intersect each other is longer than a length b1 between a second open end on the second side surface side of the first groove and a second end at which the first main surface and the second side surface intersect each other, wherein in the cross section, a length a2 between a third open end on the second side surface side of the second groove and a third end at which the second main surface and the second side surface intersect each other is longer than a length b2 between a fourth open end on the first side surface side of the second groove and a fourth end at which the second main surface and the first side surface intersect each other, and wherein if a depth of the first groove is set to d1, a depth of the second groove is set to d2, and a distance between the first main surface and the second main surface is set to t, it is satisfied that d1+d2