发明名称 |
Reduction of degradation due to hot carrier injection |
摘要 |
In a general aspect, a high-voltage metal-oxide-semiconductor (HVMOS) device can include comprising a first gate dielectric layer disposed on a channel region of the HVMOS device and a second gate dielectric layer disposed on at least a portion of a drift region of the HVMOS device. The drift region can be disposed laterally adjacent to the channel region. The second gate dielectric layer can have a thickness that is greater than a thickness of the first gate dielectric layer. |
申请公布号 |
US9537001(B2) |
申请公布日期 |
2017.01.03 |
申请号 |
US201514752373 |
申请日期 |
2015.06.26 |
申请人 |
Fairchild Semiconductor Corporation |
发明人 |
Hao Jifa;Hahn Daniel |
分类号 |
H01L29/66;H01L29/78;H01L29/423;H01L29/06;H01L29/40 |
主分类号 |
H01L29/66 |
代理机构 |
Brake Hughes Bellermann LLP |
代理人 |
Brake Hughes Bellermann LLP |
主权项 |
1. A high-voltage metal-oxide-semiconductor (HVMOS) device comprising:
a first gate dielectric layer disposed on a channel region of the HVMOS device; and a second gate dielectric layer disposed on at least a portion of a drift region of the HVMOS device, the drift region being disposed laterally adjacent to the channel region, the first gate dielectric having a portion disposed under at least a portion of the second gate dielectric, the second gate dielectric layer having a thickness that is greater than a thickness of the first gate dielectric layer. |
地址 |
San Jose CA US |