发明名称 Reduction of degradation due to hot carrier injection
摘要 In a general aspect, a high-voltage metal-oxide-semiconductor (HVMOS) device can include comprising a first gate dielectric layer disposed on a channel region of the HVMOS device and a second gate dielectric layer disposed on at least a portion of a drift region of the HVMOS device. The drift region can be disposed laterally adjacent to the channel region. The second gate dielectric layer can have a thickness that is greater than a thickness of the first gate dielectric layer.
申请公布号 US9537001(B2) 申请公布日期 2017.01.03
申请号 US201514752373 申请日期 2015.06.26
申请人 Fairchild Semiconductor Corporation 发明人 Hao Jifa;Hahn Daniel
分类号 H01L29/66;H01L29/78;H01L29/423;H01L29/06;H01L29/40 主分类号 H01L29/66
代理机构 Brake Hughes Bellermann LLP 代理人 Brake Hughes Bellermann LLP
主权项 1. A high-voltage metal-oxide-semiconductor (HVMOS) device comprising: a first gate dielectric layer disposed on a channel region of the HVMOS device; and a second gate dielectric layer disposed on at least a portion of a drift region of the HVMOS device, the drift region being disposed laterally adjacent to the channel region, the first gate dielectric having a portion disposed under at least a portion of the second gate dielectric, the second gate dielectric layer having a thickness that is greater than a thickness of the first gate dielectric layer.
地址 San Jose CA US