Charged particle beam system and method of operating a charged particle beam system

摘要

The present disclosure relates to a gas field ion source having a gun housing, an electrically conductive gun can base attached to the gun housing, an inner tube mounted to the gun can base, the inner tube being made of an electrically isolating ceramic, an electrically conductive tip attached to the inner tube, an outer tube mounted to the gun can base, the outer tube being made of an electrically isolating ceramic, and an extractor electrode attached to the outer tube. The extractor electrode can have an opening for the passage of ions generated in proximity to the electrically conductive tip.

主权项

1. A gas field ion source, comprising:
a housing, a thermally conductive base, an inner tube mounted to said base, the inner tube comprising an electrically isolating material, an electrically conductive tip attached to the inner tube, an outer tube mounted to said base, the outer tube comprising an electrically isolating material, and an extractor electrode attached to the outer tube, the extractor electrode having an opening for the passage of ions generated in proximity to the electrically conductive tip; wherein, together said base, said inner tube, said outer tube and said extractor electrode define an inner gas confining vessel.