| 发明名称 | Maskless exposure device and maskless exposure method using the same | ||
| 摘要 | A maskless exposure device includes a plurality of exposure heads, each exposure head including a digital micro-mirror device configured to scan an exposure beam to a substrate, the exposure heads being disposed in staggered first and second rows, a plurality of reflecting members disposed on side surfaces of the exposure heads and having reflecting surfaces parallel with each other, a light emitting part configured to light to the reflecting members, and a light receiving part configured to receive light via the reflecting members. | ||
| 申请公布号 | US9535333(B2) | 申请公布日期 | 2017.01.03 |
| 申请号 | US201514836422 | 申请日期 | 2015.08.26 |
| 申请人 | SAMSUNG DISPLAY CO., LTD. | 发明人 | Seo Kab-Jong;Lee Hi-Kuk;Chang Jae-Hyuk;Lee Ki-Beom |
| 分类号 | G03B27/44;G03B27/54;G03F7/20 | 主分类号 | G03B27/44 |
| 代理机构 | F. Chau & Associates, LLC | 代理人 | F. Chau & Associates, LLC |
| 主权项 | 1. A maskless exposure device comprising: a plurality of exposure heads, each exposure head including a digital micro-mirror device configured to scan an exposure beam to a substrate, wherein the exposure heads are disposed in staggered first and second rows; a plurality of reflecting members disposed on side surfaces of the exposure heads and having reflecting surfaces parallel with each other; a light emitting part configured to emit light to the reflecting members; and a light receiving part configured to receive light via the reflecting members. | ||
| 地址 | Yongin, Gyeonggi-Do KR | ||