发明名称 Nozzle assembly and method for fabricating a solar cell
摘要 A method for fabricating a solar cell using a nozzle assembly that includes a base portion, a scriber coupled to the base portion, and a nozzle coupled to the base portion such that the nozzle is positioned a predefined distance from a tip of the scriber is provided. The method generally comprises positioning a substructure that includes a buffer layer and an absorber layer proximate to the base portion. A P2 line is scribed through the buffer and absorber layers of the substructure using the scriber tip. A nanoparticle solution is sprayed, using the nozzle, onto at least one portion of the buffer layer at a predefined pressure when the P2 line is being scribed through the buffer and absorber layers such that a transparent conductive oxide (TCO) layer is inhibited from forming over the portion of the buffer layer that is being sprayed with the nanoparticle solution.
申请公布号 US9537031(B2) 申请公布日期 2017.01.03
申请号 US201313929827 申请日期 2013.06.28
申请人 Taiwan Semiconductor Manufacturing Co., Ltd. 发明人 Chen Shih-Wei
分类号 H01L21/00;H01L31/0463;H01L21/67 主分类号 H01L21/00
代理机构 Duane Morris LLP 代理人 Duane Morris LLP
主权项 1. A method for fabricating a solar cell, said method comprising: positioning a substructure that includes a buffer layer and an absorber layer proximate to a tip of a scriber; scribing a P2 scribe line through the buffer and absorber layers of the substructure using the scriber tip; and depositing a nanoparticle solution onto at least one portion of the buffer layer proximate the P2 scribe line, when the P2 scribe line is being scribed through the buffer and absorber layers, such that a transparent conductive oxide (TCO) layer is inhibited from forming over the at least one portion of the buffer layer.
地址 Hsin-Chu TW