发明名称 Magnetoresistance sensor with perpendicular anisotropy
摘要 A nanoscale tunnel magneto-resistance (TMR) sensor comprising an in-plane-magnetized reference layer and a free layer comprising interfacial perpendicular anisotropy, wherein the free layer comprises a sensing layer for sensing resistance as a function of applied magnetic field and is tunable to vary the direction of the sensing layer magnetization to be in-plane, canted, or out-of-plane.
申请公布号 US9537087(B2) 申请公布日期 2017.01.03
申请号 US201514606206 申请日期 2015.01.27
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA 发明人 Khalili Amiri Pedram;Zeng Zhongming;Wang Kang L.
分类号 H01L43/08;G01R33/09;H01L43/10 主分类号 H01L43/08
代理机构 代理人 O'Banion John P.
主权项 1. A magneto-resistance (MR) sensor, comprising: an in-plane magnetized reference layer; and a sensing layer comprising a film plane, the sensing layer having interfacial anisotropy comprising a magnetization direction out of plane with respect to the film plane; wherein the sensing layer and reference layer are separated by a dielectric barrier; wherein the sensing layer is tunable to vary the direction of the sensing layer magnetization to be canted or perpendicular out of plane to the film plane to modify sensor sensitivity and linearity; and wherein the interfacial anisotropy of the sensing layer is configured to be tuned by varying the thickness of the sensing layer and application of a voltage applied across the dielectric barrier.
地址 Oakland CA US
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