| 发明名称 | Microelectromechanical system resonators and related methods and apparatus | ||
| 摘要 | Microelectromechanical systems (MEMS) resonators and related methods and apparatus are provided. A MEMS resonator may include a first portion and a second portion. The first portion may be configured to resonate, and the second portion may be configured to operate based on an energy trapping principle to prevent energy from traveling therethrough from the first portion. The MEMS resonator may be a Lamb wave resonator. The MEMS resonator may be anchorless. The MEMS resonator may have a side contacted by the anchor, wherein the anchor contacts greater than approximately 50% of the side. | ||
| 申请公布号 | US9537466(B1) | 申请公布日期 | 2017.01.03 |
| 申请号 | US201313873906 | 申请日期 | 2013.04.30 |
| 申请人 | Analog Devices, Inc. | 发明人 | Thalmayr Florian;Kuypers Jan H.;Sparks Andrew |
| 分类号 | H03H9/08;H03H9/09;H03H9/15;H03H9/25;B81B7/00 | 主分类号 | H03H9/08 |
| 代理机构 | Wolf, Greenfield & Sacks, P.C. | 代理人 | Wolf, Greenfield & Sacks, P.C. |
| 主权项 | 1. An apparatus, comprising: a substrate; a mechanical resonating structure having a side with a first length; and an anchor coupling the mechanical resonating structure to the substrate and having a first end contacting the side and a second end contacting the substrate, wherein the anchor is laterally patterned such that a second length of the first end differs from and is greater than approximately 50% of the first length. | ||
| 地址 | Norwood MA US | ||