ANNEALING METHOD,申请号KR20100103663-传众专利搜索

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发明名称	ANNEALING METHOD
摘要	실시예에 따른 열처리 방법은, 박막의 비저항 값을 실시간 모니터링하여 상기 박막의 비저항 값을 제어하면서 상기 박막을 열처리한다.
申请公布号	KR101683907(B1)	申请公布日期	2016.12.07
申请号	KR20100103663	申请日期	2010.10.22
申请人	엘지이노텍 주식회사	发明人	이동열;채경훈;유영선;노영진;이용진;이선영;이효수;안경준
分类号	H01L21/67	主分类号	H01L21/67
代理机构		代理人
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