| 摘要 |
PROBLEM TO BE SOLVED: To segment a laminated ceramic substrate consisting of ceramic substrates of different materials laminated.SOLUTION: In the ceramic substrate 11 of a laminated ceramic substrate 10 consisting of ceramic substrates 11, 12, and 13 of different materials, a first scribe line S1 is formed by a scribe device along an intended segmentation line. In the third ceramic substrate 13, a second scribe line S2 is formed by a scribe device at the same position as the first scribe line S1. Then, the laminated ceramic substrate 10 is broken individually from the sides of the ceramic substrates 11 and 13 along the scribe lines S1 and S2, respectively. The method enables segmenting the laminated ceramic substrate 10 completely. |
