发明名称 樹脂部材の赤外線透過波長域に対応する熱放射光を選択的に放射する波長選択性熱放射材料及びその製造方法
摘要 An object is to provide a method for manufacturing a wavelength selective heat radiation material in which a surface roughness of an upper portion of a cavity wall defining each microcavity is suppressed or in which microcavities each having an aspect ratio larger than 3.0 are formed. For the wavelength selective heat radiation material, a base material having a mask having predetermined openings tightly adhered to a surface thereof, or a base material in which depressions are previously formed on one surface thereof by pressing a die having projections arrayed so as to correspond to positions of microcavities thereagainst, is subjected to anisotropic etching, thereby providing a wavelength selective heat radiation material in which the surface roughness of the upper portion of the cavity wall defining each of the microcavities is suppressed or a wavelength selective heat radiation material having microcavities whose each aspect ratio is larger than 3.0.
申请公布号 JP6039825(B2) 申请公布日期 2016.12.07
申请号 JP20150559383 申请日期 2015.04.02
申请人 公立大学法人首都大学東京;オキツモ株式会社 发明人 益田 秀樹;近藤 敏彰;豊永 隆;木村 直史;吉岡 文孝
分类号 H01L23/373;C25F3/02;C25F3/20;H01L23/36 主分类号 H01L23/373
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