发明名称 バーニッシュ加工方法およびバーニッシュ加工装置
摘要 An object is to provide a burnishing method in which it is possible to reduce the flying height of a magnetic head by improving the smoothness of the surface of a magnetic disk while suppressing contamination of the magnetic disk due to falling-off or crushing of abrasive grains from a polishing tape. In the burnishing method, an alignment process of adjusting the position in a thickness direction of a magnetic disk 10 of an outer peripheral plate 75 installed outside an outer peripheral end 10c of at least one of the magnetic disk 10 and the magnetic disk 10 so as to make the surface of the outer peripheral plate 75 and the surface of the magnetic disk 10 become flush with each other is performed between a substrate installation process and a burnishing process.
申请公布号 JP6037672(B2) 申请公布日期 2016.12.07
申请号 JP20120138576 申请日期 2012.06.20
申请人 昭和電工株式会社 发明人 坂口 竜二
分类号 G11B5/84 主分类号 G11B5/84
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