发明名称 MEMS APPARATUS WITH INCREASED BACK VOLUME
摘要 A microelectromechanical system (MEMS) microphone assembly includes a base and a cover. The cover is coupled to the base and together with the base defines a cavity. The base forms a recess and the recess has dimensions and a shape so as to hold a MEMS die. The MEMS die includes a diaphragm and back plate.
申请公布号 EP2979466(A4) 申请公布日期 2016.12.07
申请号 EP20140774348 申请日期 2014.03.21
申请人 Knowles Electronics, LLC 发明人 CONKLIN, Wade
分类号 H04R19/04;H01L29/84;H04R1/04;H04R1/28;H04R19/00 主分类号 H04R19/04
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