| 摘要 |
A vacuum tray 10, system and method are disclosed for testing a device under test 50 (DUT). A vacuum chamber 12 defines a sealed vacuum around the DUT and a support 30, possibly a pedestal, supports the DUT within the chamber during testing. An electrical test interface 40 is configured to connect between the DUT 50 and testing system and a vacuum interface 24 is configured to connect to a vacuum pump. A sealable access door 16 may allow loading of the DUT. The DUT support 30 may comprise a vibration engagement interface 36 extending out of the chamber, with a sealing extension passage 37, for use in vibration testing of the DUT in the vacuum environment. A frame may define storage and test positions and a transport vehicle (109, figure 7), together with possible wheels 22 on the vacuum tray may provide for an automated test equipment (ATE). |
