发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 This invention is provided with: a step (S01) for readying a semiconductor substrate having a first main surface and a second main surface located on the opposite side of the first main surface; a step (S02) for forming a first electrode on the first main surface; a step (S03) for forming a solder-bonding metal film (first solder-bonding metal film) on the first electrode; a step (S04) for forming a sacrificial film on the first solder-bonding metal film; a step (S06) for grinding the second main surface after the sacrificial film has been formed; a step (S07) for performing, after the grinding step (S06), a heat treatment (an element structure being formed on the third main surface side in (S07)); a step (S10) for removing the sacrificial film after the heat treatment step (S07); and a step (S12) for solder-bonding the first solder-bonding metal film and the first external electrode.
申请公布号 WO2016189643(A1) 申请公布日期 2016.12.01
申请号 WO2015JP64998 申请日期 2015.05.26
申请人 MITSUBISHI ELECTRIC CORPORATION 发明人 NAKATA, Yosuke
分类号 H01L21/60;H01L21/304;H01L21/3205;H01L21/768;H01L23/522 主分类号 H01L21/60
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