发明名称 |
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE |
摘要 |
This invention is provided with: a step (S01) for readying a semiconductor substrate having a first main surface and a second main surface located on the opposite side of the first main surface; a step (S02) for forming a first electrode on the first main surface; a step (S03) for forming a solder-bonding metal film (first solder-bonding metal film) on the first electrode; a step (S04) for forming a sacrificial film on the first solder-bonding metal film; a step (S06) for grinding the second main surface after the sacrificial film has been formed; a step (S07) for performing, after the grinding step (S06), a heat treatment (an element structure being formed on the third main surface side in (S07)); a step (S10) for removing the sacrificial film after the heat treatment step (S07); and a step (S12) for solder-bonding the first solder-bonding metal film and the first external electrode. |
申请公布号 |
WO2016189643(A1) |
申请公布日期 |
2016.12.01 |
申请号 |
WO2015JP64998 |
申请日期 |
2015.05.26 |
申请人 |
MITSUBISHI ELECTRIC CORPORATION |
发明人 |
NAKATA, Yosuke |
分类号 |
H01L21/60;H01L21/304;H01L21/3205;H01L21/768;H01L23/522 |
主分类号 |
H01L21/60 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|