| 摘要 |
In order to provide a scanning probe microscope capable of automatically adjusting the positions of a laser element and a photodetector, a scanning probe microscope 1 is provided with: a sample stage unit 32; a light source unit 30; a cantilever 21 and a cantilever support unit 20 to which the cantilever 21 attaches; a photodetection unit 31; and a control unit 40. The scanning probe microscope 1 is further provided with: an ultrasonic motor or a stepping motor 30b, which moves the light source unit 30 in the x and y directions; and a CCD camera 33 that acquires an observed image. One cantilever 21 selected from a plurality thereof is attached to the cantilever support unit 20. Whenever a cantilever 21 is attached to the cantilever support unit 20, the control unit 40 performs a light source unit control step wherein the control unit 40 detects, on the basis of the observed image, the position of a feature point on the cantilever 21 and the position of the radiation of a laser beam, and controls the motor 30b such that the laser beam is radiated onto an irradiation surface. |
