发明名称 液体吐出ヘッドの製造方法
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a liquid ejection head capable of more effectively suppressing damage on a substrate with etching solution in chemical etching using the etching solution.SOLUTION: A method of manufacturing a liquid ejection head including a member comprising a liquid channel communicated with an ejection port for ejecting liquid and a substrate having a liquid supply port for supplying the liquid to the liquid channel includes (1) a step of providing the member on a first surface of the substrate, (2) a step of forming a first protective film on a substrate edge part, (3) a step of forming a second protective film to cover the first surface side of the substrate and to make contact with the first protective film, and (4) a step of forming the liquid supply port from the second surface side being the opposite to the first surface of the substrate by chemical etching using alkali etching solution, in this order.
申请公布号 JP6032955(B2) 申请公布日期 2016.11.30
申请号 JP20120131986 申请日期 2012.06.11
申请人 キヤノン株式会社 发明人 渡部 正久;小山 修司;藤井 謙児;大宅 修平;南 聖子
分类号 B41J2/16;B41J2/14 主分类号 B41J2/16
代理机构 代理人
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