| 摘要 |
Methods and apparatus are described for improving the fabrication of thin film electrochemical devices such as thin film batteries and electrochromic devices, with respect to deposition of LiPON, or other lithium ion conducting electrolyte, thin films on electrodes such as Li metal, Li—CoO2, WO3, NiO, etc. A method of fabricating an electrochemical device in a deposition system may comprise: configuring an electrically conductive layer substantially peripherally to a portion of the surface of an electrode layer of the electrochemical device; electrically connecting the electrically conductive layer to an electrically conductive, but electrically floating, surface; and depositing a lithium ion conducting solid state electrolyte layer on the portion of the surface of the electrode layer of the electrochemical device within the deposition chamber, wherein the depositing comprises forming a plasma within the deposition chamber; wherein during the depositing, the electrically conductive, but electrically floating, surface is within the deposition chamber. |
