发明名称 |
MICRO-ELECTROMECHANICAL STRUCTURE RESONATOR AND METHOD OF MAKING IT |
摘要 |
The invention relates to a hollow microbeam that is fabricated upon a base or pedestal. Processing of the hollow microbeam includes forming at least one hollow channel in the microbeam by removing temporary fillers after formation of the microbeam. The inventive microbeam may provide at least an order of magnitude increase in oscillational frequency over a solid microbeam. |
申请公布号 |
EP1260019(B1) |
申请公布日期 |
2016.11.30 |
申请号 |
EP20010908666 |
申请日期 |
2001.01.22 |
申请人 |
INTEL CORPORATION |
发明人 |
MA, QING;CHENG, PENG |
分类号 |
H03H3/00;G11B5/48;G11B21/16;G11B21/21;H03H3/007;H03H9/24 |
主分类号 |
H03H3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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