发明名称 RETAINER AND SUBSTRATE STORING CONTAINER
摘要 To provide a retainer and a substrate storage container which can prevent contamination and damage accompanying the turning of substrates, alleviate impacts acting on the substrates to thereby eliminate the risk of the substrates from dislodging and being broken and which can simplify the task of attaching the retainer-equipped door to the container body. A retainer 20 is formed of a frame 21 attached to the backside central part 13 of a door 10 of a substrate storage container, a pair of first elastic parts 29 projected from a pair of opposing parts 22 of frame 21 so as to approach each other and a second elastic part 31 that is supported at bent free ends 30 of the paired first elastic parts 29 to hold a semiconductor wafer W. Further, the outside end 32 of the second elastic part 31 is positioned outside free end 30 of first elastic part 29 and closer to the opposing part 22 of frame 21, and a multiple number of first and second holds 33 and 34 for holding the rim on the front side of semiconductor wafer W are formed apart from each other, the second hold 34 being positioned closer to the outside end 32 side of the second elastic part 31 than the first hold 33 is.
申请公布号 EP2207199(B1) 申请公布日期 2016.11.30
申请号 EP20080846396 申请日期 2008.10.30
申请人 SHIN-ETSU POLYMER CO. LTD. 发明人 OGAWA, OSAMU
分类号 H01L21/673;B65D85/86 主分类号 H01L21/673
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