A method for reduction of stiction while manipulating micro objects on a surface
摘要
A system and method reduce stiction while manipulating micro objects on a surface. The system and method employed a field generator configured to generate a driving force at a frequency and amplitude to at least partially overcome stiction between the micro objects and the surface. The field generator is further configured to generate a manipulation force to manipulate the micro objects on the surface in two dimensions. The manipulation force is spatially programmable.
申请公布号
EP2851336(B1)
申请公布日期
2016.11.30
申请号
EP20140184809
申请日期
2014.09.15
申请人
PALO ALTO RESEARCH CENTER INCORPORATED
发明人
THOMPSON, JASON;CHOW, EUGENE M.;LU, JENGPING;WHITING, GREGORY L.;BIEGELSEN, DAVID K.;VERES, JANOS