| 摘要 |
The invention addresses the problem of providing a processed monocrystal member and a manufacturing method therefor, the processed monocrystal member facilitating detachment when forming relatively large thin monocrystal substrates by detachment from a modified layer formed in a monocrystal member while limiting the occurrence of defects in the detachment surface. The processed monocrystal member (20): is formed by concentrating laser light from the surface (20t) of the monocrystal member on the side that is irradiated into the interior of the monocrystal member; and comprises a processed region (21), which is at a distance from the surface (20t) and extends parallel to the surface (20t), and non-processed regions (22) adjacent to the processed region (21). Between the processed region (21) and the non-processed regions (22), continuous boundaries (23) are formed. |
