发明名称 微細パターン形成方法、及び微細パターン形成装置
摘要 A method for forming fine patterns, including: holding, by a holding member, a sheet-like deformable thin-plate mold with fine patterns having been predeterminedly formed, above a UV-light-transparent substrate such that a UV hardening resin has been applied beforehand on a surface thereof, in such a manner that the mold is at a predetermined angle inclined with tension being applied; and letting a surface of the thin-plate mold serially get in contact with the UV hardening resin by allowing, after a first pressing roll installed above the thin-plate, mold is allowed to descend from above the thin-plate mold, the first pressing roll to relatively move concerning the substrate in a lateral direction while pressing, by the first pressing roll, the thin-plate mold against the UV hardening resin with a predetermined pressure.
申请公布号 JP6032492(B2) 申请公布日期 2016.11.30
申请号 JP20130109776 申请日期 2013.05.24
申请人 パナソニックIPマネジメント株式会社 发明人 和田 紀彦
分类号 B29C59/02;H01L21/027 主分类号 B29C59/02
代理机构 代理人
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