METHOD FOR PRODUCING MOLD FOR FINE PATTERN TRANSFER, METHOD FOR PRODUCING DIFFRACTION GRATING USING SAME, AND METHOD FOR MANUFACTURING ORGANIC EL ELEMENT WHICH COMPRISES THE DIFFRACTION GRATING

摘要

A method for producing a mold includes: applying a block copolymer solution 30 made of first and second polymers on a base member 10; performing a first annealing process at a temperature higher than a glass transition temperature of the block copolymer after drying the coating film; forming a concavity and convexity structure 36 on the base member by removing the second polymer by an etching process; performing a second annealing process of the concavity and convexity structure 36 at a temperature higher than a glass transition temperature of the first polymer; forming a seed layer 40 on the concavity and convexity structure; laminating or stacking a metal layer 50 on the seed layer 40 by an electroforming; and peeling off the metal layer 50 from the base member. The second annealing process enables satisfactory transfer of a concavity and convexity structure 70 on the base member onto the metal layer. Accordingly, there is provided a mold for minute pattern transfer, which is suitable for producing an optical component such as a diffraction grating.