| 摘要 |
PROBLEM TO BE SOLVED: To determine a suitable opening pattern in accordance with a category of an imaging object.SOLUTION: When designing an opening pattern, a plurality of images are prepared which indicate a plurality of alignment marks, respectively, and a representative spectrum is acquired from among a plurality of power spectrums in the plurality of images. A plurality of candidate patterns are prepared for the opening pattern and an evaluation value indicating restoration accuracy for an image which is captured by utilizing each of the candidate patterns, is calculated in each of directions while using a noise level in an imaging section 2 and the representative spectrum. By calculating a final evaluation value from the evaluation values in a plurality of directions for the candidate patterns, an opening pattern 221 to be utilized in the imaging section 2 is determined from among the plurality of candidate patterns. Thus, the suitable opening pattern 221 for the alignment marks can be determined and images can be accurately restored in an image restoration device in which the opening pattern 221 is provided in the imaging section 2. |
