MEMS devices and processes

摘要

A MEMS transducer comprising a membrane 301 and at least one mount structure 305 for supporting the membrane relative to a substrate provides a flexible membrane and further comprises one or more stress diffusing structures 701 for example a slit, is/are provided in the membrane so as to diffuse stress in the region of the mount. The membrane may have a first/active region 301 and a second/inactive region 302. The slits may be C- or U shaped. The transducer may also comprise a variable vent structure (307 see Figure 5) in the inactive region 302.