| 摘要 |
In a thermal air flow sensor according to the invention, a hollow (200) formed in a detecting element (50) is communicated with a circuit chamber (400), in which driving circuit parts (401) of the detecting element (50) are mounted, or an intake duct exterior (700). Thereby, pressure in the hollow (200) balances with pressure on the outside. Also, since the circuit chamber (400) is provided to be isolated from a detection chamber, in which a detecting part of the detecting element (50) is arranged, that is, a passage chamber (300), through which air being a measuring object flows, air flowing in the passage chamber (300) can be restrained from flowing into the hollow (200) to have an influence on flow output characteristics. |
