发明名称 |
COATING SOURCE WITH A TARGET ADAPTED TO AN INDIRECT COOLING DEVICE |
摘要 |
The invention relates to a target which is embodied as a material source for a depositing method from the gas phase, comprising a front side and a rear side, characterized in that a self-adhesive carbon film is applied to the rear side. Said target can be embodied as a material source for a sputtering method and/or for an arc evaporation method. A particular advantage is that the target is used in a coating source with indirect cooling, the self-adhesive carbon film being in contact with the surface of the membrane which is part of a cooling channel. |
申请公布号 |
EP2834389(B1) |
申请公布日期 |
2016.11.30 |
申请号 |
EP20130709319 |
申请日期 |
2013.03.05 |
申请人 |
OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON |
发明人 |
KRASSNITZER, SIEGFRIED;HAGMANN, JUERG |
分类号 |
C23C14/34 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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