发明名称 |
METHOD AND APPARATUS FOR GAS FLOW CONTROL |
摘要 |
A method and apparatus for self-calibrating control of gas flow. The gas flow rate is initially set by controlling, to a high degree of precision, the amount of opening of a flow restriction, where the design of the apparatus containing the flow restriction lends itself to achieving high precision. The gas flow rate is then measured by a pressure rate-of-drop upstream of the flow restriction, and the amount of flow restriction opening is adjusted, if need be, to obtain exactly the desired flow. |
申请公布号 |
EP2488925(B1) |
申请公布日期 |
2016.11.30 |
申请号 |
EP20100779088 |
申请日期 |
2010.10.15 |
申请人 |
PIVOTAL SYSTEMS CORPORATION |
发明人 |
MONKOWSKI, ADAM, J.;CHALMERS, JAMES, MACALLEN;CHEN, JIALING;DING, TAO;MONKOWSKI, JOSEPH, R. |
分类号 |
F16K7/14;F16K31/00;G05D7/06 |
主分类号 |
F16K7/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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