| 摘要 |
This dust collection tool (1) collects particles contained inside a machine that is used in a semiconductor production process and is to have a substrate for semiconductor production placed therein. The dust collection tool (1) is provided with: a base plate (10) that is transportable by a substrate transport mechanism, provided inside the machine, for transporting a substrate (W) to be processed; a filter unit (4) that is provided on the base plate and collects particles contained in the airflow; and a flow passage for letting the airflow pass through into the filter unit. |
