METHOD FOR ESTIMATING CARBOXYLIC ACID GAS CONCENTRATION, AND SOLDERING DEVICE

摘要

Provided is a method for estimating carboxylic acid gas concentration allowing safe measuring in real time of the carboxylic acid gas concentration of formic acid gas or the like inside the chamber (10) of a soldering device, and a soldering device allowing estimation of the chamber-interior concentration of carboxylic acid gas. The surface temperature of an object placed inside the chamber is measured at the same time using a thermometer (first thermometer) (37) that can measure temperature without being affected by carboxylic-acid-induced infrared ray absorption, and a radiation thermometer (second thermometer) (38) for measuring temperature using infrared radiation in a wavelength band in which carboxylic acid is absorbed, and the concentration of carboxylic acid gas inside the chamber is estimated based on the temperature difference between the first thermometer and the second thermometer (”Tx). The soldering device is provided with a heating stage (30), a means (25) for introducing a mixed gas comprising an inert gas and carboxylic acid gas, a gas discharge means (26), the first thermometer (37), and the second thermometer (38).