ELECTROSTATIC ATTRACTION APPARATUS FOR GLASS SUBSTRATE AND METHOD FOR ATTRACTING AND RELEASING SUCH GLASS SUBSTRATE

摘要

An object is providing an electrostatic attraction apparatus and an attracting/releasing method capable of reliably attracting and quickly releasing a glass substrate. An attraction force for attracting a glass substrate is obtained according to the physical properties of the glass substrate. In addition to obtaining an attraction voltage (V c (t)) required for obtaining the attraction force, a holding voltage (V h (t)) for holding an attraction state and a release voltage (V r (t)) for releasing the glass substrate are also obtained (S1 to S7). Attraction time period (t c ) is actually measured and if this measured time is different from a preset attraction time (t 1 ), the holding voltage (V h (t)) and the release voltage (V r (t)) are recalculated according to the actually measured attraction time period (t c ) (S8 to S11).