| 摘要 |
PROBLEM TO BE SOLVED: To provide a slide member that can achieve both low friction characteristics and high wear resistance at high level.SOLUTION: A slide member of the present invention includes a base material and a slide film which is formed on the base material and constitutes a slide surface. Assuming that the content of the film is 100 atom% in total, the slide film is formed of boron-containing amorphous carbon (B-DLC) containing 1-20% of B and 0.1-13% of H. The B-DLC has a density of 2.2-2.6 g/cm. Further, it is preferred that the B-DLC has a difference (Csp-H) between a Cspcontent and an H content of 25-45%, the Cspcontent being an atomic ratio of C(Csp) having an sphybrid orbital with respect to the whole C content. The slide film formed of such B-DLC is prepared by, for example, using the sputtering method. The B-DLC film according to the present invention has high toughness while exerting low friction characteristics and high wear resistance, thereby is suitable for driving system members of an engine and the like.SELECTED DRAWING: Figure 3 |
