发明名称 SACRIFICIAL SHORTING STRAPS FOR SUPERCONDUCTING QUBITS
摘要 A technique relates to protecting a tunnel junction. A first electrode paddle and a second electrode paddle are on a substrate. The first and second electrode paddles oppose one another. A sacrificial shorting strap is formed on the substrate. The sacrificial shorting strap connects the first electrode paddle and the second electrode paddle; The tunnel junction is formed connecting the first electrode paddle and the second electrode paddle, after forming the sacrificial shorting strap. The substrate is mounted on a portion of a quantum cavity. The portion of the quantum cavity is placed in a vacuum chamber. The sacrificial shorting strap is etched away in the vacuum chamber while the substrate is mounted to the portion of the quantum cavity, such that the sacrificial shorting strap no longer connects the first and second electrode paddles. The tunnel junction has been protected from electrostatic discharge by the sacrificial shorting strap.
申请公布号 US2016343934(A1) 申请公布日期 2016.11.24
申请号 US201514714894 申请日期 2015.05.18
申请人 International Business Machines Corporation 发明人 Chang Josephine B.;McClure, III Douglas T.
分类号 H01L39/22;H01L39/24 主分类号 H01L39/22
代理机构 代理人
主权项
地址 Armonk NY US